Multilayer Thin-Film Capacitor Fabricated by Radio-Frequency Magnetron Sputtering

In this study, we fabricate multilayer ceramic capacitors (MLCCs) composed of dielectric layers with Pt internal electrodes by single sputtering deposition. We deposited approximately 300-nm-thick BaTiO3 (BT) layers on Pt/Ti-coated SiO2/Si substrates through a movable shadow mask. The separated internal Pt electrodes are prepared by sliding the shadow mask. Multilayered BT thin films are uniformly deposited on a Si substrate with external electrodes on both sides of the BT films. The MLCCs with five BT layers have excellent dielectric properties; a relative dielectric constant of approximately 320 and a dielectric loss of around 2% regardless of the number of dielectric layers.