Preparation of nanocomposite carbonaceous films containing palladium nanograins and studies of the annealing time influence on their structure and sensing properties

C-Pd films were obtained by Physical Vapor Deposition (PVD) or by annealing of these initial PVD films at 650°C in different time (5, 10 and 30 minutes) in argon flow. These C-Pd films were characterized by Scanning Electron Microscopy (SEM), Transmission Electron Microscopy (TEM) and FTIR spectroscopy. The sensing properties of the films were studied in a specially prepared chamber allowing for measurements of the changes in resistivity as a function of gas composition changes. It was found that annealing changes the films morphology, topography and structure, and consequently their sensing properties.