Implantable double-layer pump chamber piezoelectric valveless micropump with adjustable flow rate function

Abstract The piezoelectric valveless micropump with the characteristics of precise liquid delivery is widely utilized in the field of biomedicine. However, the improvement of the flow rate of the piezoelectric micropump relies on the increase in size and driving voltage, which hinders its application in the implantable medical field. This article proposes a double-layer chamber valveless piezoelectric micropump, which has the obvious advantages of small size and adjustable flow rate, and is expected to be applied to the treatment of implantable hydrocephalus. The overall size of the micropump is 10 mm × 10 mm × 4 mm, which can be implanted in the cerebral cortex. Combined with polydimethylsiloxane-polyethylene glycol terephthalate bonding technology, the double-layer chamber micropump solves the contradiction between miniaturization and large flow range. The flow rate generated by micropump under low voltage can be adjusted according to the amount of hydrocephalus. In order to reveal the mechanism of increasing the flow rate, the working efficiencies of the microvalve and micropump are studied in this article. The electric-solid-fluid coupling simulation and experimental tests obtained the optimal structural parameters: the divergence angle is 30°, the throat width is 300 μ m, and the upper chamber depth is 100 μ m. The proposed micropump can achieve the tunable flow rate of 2.16–51.74 μ l min −1 .