光学
衍射
衍射光栅
材料科学
傅里叶变换
衍射效率
摄影术
相干衍射成像
可靠性(半导体)
计算机科学
物理
相位恢复
量子力学
功率(物理)
作者
Anubhav Paul,Dmytro Kolenov,Thomas Scholte,Silvania F. Pereira
出处
期刊:Applied Optics
[The Optical Society]
日期:2023-09-15
卷期号:62 (29): 7589-7589
被引量:1
摘要
Detecting defects on diffraction gratings is crucial for ensuring their performance and reliability. Practical detection of these defects poses challenges due to their subtle nature. We perform numerical investigations and demonstrate experimentally the capability of coherent Fourier scatterometry (CFS) to detect particles as small as 100 nm and also other irregularities that are encountered usually on diffraction gratings. Our findings indicate that CFS is a viable tool for inspection of diffraction gratings.
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