薄膜晶体管
材料科学
晶体管
多晶硅耗尽效应
非晶硅
光电子学
硅
阈下传导
无定形固体
薄膜
阈下斜率
阈值电压
纳米技术
电气工程
晶体硅
电压
栅氧化层
工程类
图层(电子)
结晶学
化学
作者
M. S. Shur,H. C. Slade,Mark Jacunski,Albert A. Owusu,Trond Ytterdal
摘要
We describe physically based analytical models for n‐channel amorphous silicon thin film transistors and for n‐ and p‐channel polysilicon thin film transistors. The models cover all regimes of transistor operation: leakage, subthreshold, above‐threshold conduction, and the kink regime in polysilicon thin film transistors. The models contain a minimum number of parameters which are easily extracted and can be readily related to the structural and material properties of the thin film transistors. The models have been verified for a large number of devices to scale properly with device geometry.
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