材料科学
薄膜晶体管
无定形固体
X射线光电子能谱
辐照
阈值电压
光电子学
氧化物
晶体管
分析化学(期刊)
纳米技术
化学工程
电压
图层(电子)
电气工程
化学
冶金
物理
色谱法
核物理学
工程类
有机化学
作者
Umu Hanifah,Juan Paolo Bermundo,Mutsunori Uenuma,Yukiharu Uraoka
标识
DOI:10.1088/1361-6463/acdefb
摘要
Abstract Developing a low-temperature fabrication strategy for amorphous oxide semiconductors, such as amorphous indium zinc oxide (a-IZO) channel layers, for use in flexible oxide-based thin-film transistors (TFTs) is essential. In this work, high-performance and highly stable all-solution processed a-IZO TFTs were achieved by varying the duration of a photo-assisted combination treatment (UV combination treatment), which combines UV irradiation with a low heating temperature (115 °C) in an all-solution processed approach. From the experimental results, UV irradiation can activate the IZO source, drain, and gate electrodes which induces TFT switching. X-ray photoelectron spectroscopy analysis revealed oxygen vacancy ( V o ) generation after the UV combination treatment which increased the carrier concentration and improved the conductivity of IZO. All-solution processed a-IZO TFTs with high performance and stability, high mobility ( µ ) up to 17.45 cm 2 V −1 s −1 , threshold voltage (V th ) = −1.2 V, and subthreshold swing ( SS ) = 0.64 V dec −1 , were obtained at a low temperature of 115 °C for 90 min treatment time. The stability behavior of self-aligned top-gate, top-contact a-IZO TFT fabricated by UV combination treatment was investigated under positive bias stress (PBS) and negative bias stress (NBS) with the smallest Δ V th of 2.4 V and 0.5 V for PBS and NBS, respectively. Our work shows that better stability indicated by the smaller Δ V th is achieved due to reduction of interface trap density and moisture-related impurities, in particular on the activated electrode area. As a result, it can be inferred that UV combination treatment is a simple and promising method to enhance the electrical and stability performance of a-IZO TFTs even with the low-temperature process, which is useful for flexible devices.
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