钻石
曲率半径
材料科学
曲率
激光器
拉曼光谱
光学
光电子学
半径
人造金刚石
复合材料
物理
几何学
计算机科学
平均曲率
流量平均曲率
计算机安全
数学
作者
Buxing Han,Sean D. Reilly,Johannes Herrnsdorf,Enyuan Xie,Vasili G. Savitski,Alan J. Kemp,Erdan Gu,Martin D. Dawson
标识
DOI:10.1016/j.diamond.2016.01.016
摘要
The design and fabrication of large radii of curvature micro-lenses in single crystal chemical vapour deposition diamond is described. An optimised photoresist reflow process and low selectivity inductively coupled plasma etching are used to actualize a uniform array of micro-lenses with radii of curvature of 13 mm or more and a high quality surface of a root-mean-square roughness of 0.18 nm. The processes developed have the potential to achieve diamond micro-lenses with an even larger radius of curvature. These new diamond micro-lenses enable the pulse energy scalable monolithic diamond Raman laser where a large radius of curvature of the micro-lenses is critical.
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