辉光放电
仿形(计算机编程)
材料科学
等离子体
光谱学
薄膜
分析化学(期刊)
纳米技术
化学
计算机科学
物理
环境化学
量子力学
操作系统
作者
Alenka Vesel,Rok Zaplotnik,Gregor Primc,Miran Mozetič
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:2023-06-08
卷期号:41 (4)
被引量:2
摘要
Glow discharge optical emission spectroscopy (GDOES) is a useful technique for qualitative plasma characterization. It also enables depth profiling of solid materials upon exposure of samples to energetic positively charged ions from gaseous plasma, providing specifics of both surface- and gas-phase collision phenomena that are considered. The early stages of developing GDOES useful for the determination of surface composition and depth profiling of solid materials are reviewed and analyzed, stressing the contribution of early authors. The advantages as well as drawbacks of the GDOES technique are presented and discussed. The recent applications of this technique for depth profiling of various materials are presented, and the directions for constructing a laboratory-scale device are provided.
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