A new fabricating method of tunable grating

A novel approach for fabrication of a tunable grating is introduced.First,use the method of UV lithography to fabricate a micron-scale grating structure with a period of 8 μm,and transfer the micron-scale grating to PDMS film to obtain the embedded PDMS grating.Taking advantage of excellent elasticity of PDMS,stretch the film along the grating line,as the grating line elongating,grating constant decrease and the period control limit is 5 μm.Traditional method for tunable grating fabrication has harsh process condition,complex fabrication process,high costs and long cycle.This method for adjustable grating fabrication has advantages of low cost,short cycle,simple process and easy to control,so it can be widely used in micro-spectrometer,scanners,optical communications and other fields.