Solid-state-laser driven plasma produced from laser-preformed tin microdroplets for high-brightness EUV

Extreme ultraviolet (EUV) nanolithography relies on CO 2 -lasers to drive EUV-emitting tin plasma at 10.6-micrometer wavelength. We will present research using instead solid-state laser light, at 2-micrometer wavelength, to efficiently drive plasma from carefully preshaped targets.