<title>Optical microspectrometer in SiON slab waveguides</title>

An integrated microspectrometer is presented using SiON-slab waveguides on silicon substrates. The microspectrometer is utilized as a versatile detection unit of micro total analysis systems by broad band VIS-spectroscopy. It is designed for efficient diffraction in the wavelength range between 300 - 700 nm, a high spectral resolution and dispersion, respectively. The spectrometer consists of a planar 5 by 5 mm² transmission grating, a cylindric lens and a commercial silicon diode array positioned in its focus for simultaneous intensity detection of the complete visible spectrum. No moving parts and a compact optical sensor head enable mobile use free of maintenance.