涂层
相关系数
滤波器(信号处理)
算法
度量(数据仓库)
图层(电子)
材料科学
逆滤波器
反问题
相关性
反向
计算机科学
数学
统计
数据挖掘
数学分析
计算机视觉
复合材料
几何学
作者
И. В. Кочиков,S. A. Sharapova,A. G. Yagola,Alexander V. Tikhonravov
标识
DOI:10.1515/jiip-2020-0079
摘要
Abstract On-line optical monitoring of multilayer coating production requires solving inverse identification problems of determining the thicknesses of coating layers. Regardless of the algorithm used to solve inverse problems, the errors in the thicknesses of the deposited layers are correlated by the monitoring procedure. Studying the correlation of thickness errors is important for the production of the most complex optical coatings. We develop a general geometric approach to study this correlation. It is based on a statistical analysis of large numbers of error vectors obtained during computational experiments on optical coating production. The application of the proposed approach is demonstrated using computational manufacturing experiments on the production of a 50-layer filter with four different monitoring strategies. A special coefficient is introduced to evaluate the strength of the error correlation effect. The results obtained confirm that the introduced parameter can be used as a measure of the strength of the correlation effect in practical applications.
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