Microcantilever sensors for biochemical detection

Abstract Microcantilever is one of the most popular miniaturized structures in micro-electromechanical systems (MEMS). Sensors based on microcantilever are ideal for biochemical detection, since they have high sensitivity, high throughput, good specification, fast response, thus have attracted extensive attentions. A number of devices that are based on static deflections or shifts of resonant frequency of the cantilevers responding to analyte attachment have been demonstrated. This review comprehensively presents state of art of microcantilever sensors working in gaseous and aqueous environments and highlights the challenges and opportunities of microcantilever biochemical sensors.