薄膜晶体管
重点(电信)
材料科学
晶体管
制作
非晶硅
数码产品
光电子学
栅极电介质
硅
液晶显示器
工程物理
电介质
接口(物质)
无定形固体
纳米技术
电气工程
工程类
晶体硅
图层(电子)
电压
结晶学
化学
病理
替代医学
毛细管作用
复合材料
医学
毛细管数
出处
期刊:Journal of vacuum science & technology
[American Vacuum Society]
日期:1984-10-01
卷期号:2 (4): 827-834
被引量:41
摘要
This paper reviews thin film transistor technology with a detailed emphasis on amorphous silicon (a-Si:H) devices. The fabrication and large area technology issues are described. The materials parameters that affect device performance are dominated by interface effects and the gate dielectric. The problem of characterizing the interfaces is discussed. Applications in liquid crystal displays (LCD) and image sensors are described. It is concluded that there is considerable promise for this rapidly expanding technology.
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