Antiferroelectric 0.94NaNbO 3 -0.06(Ca 0.5 Sr 0.5 )ZrO 3 films on (001) and (110) SrTiO 3 single crystal substrates were successfully fabricated by a pulsed laser deposition method. Partial substitution of NaNbO 3 with (Ca 0.5 Sr 0.5 )ZrO 3 stabilized antiferroelectric phase of NaNbO 3 . Especially, two types of domains, which c-axis of antiferroelectric orthorhombic phase grew along with in-plane and out-of-plane direction, were observed in the 0.94NaNbO 3 -0.06(Ca 0.5 Sr 0.5 )ZrO 3 film on (001) SrTiO 3 substrate. It was suggested that these two domains contribute the exhibition of superb antiferroelectricity in the film.