Research on cell activity sensor based on impedance principle

Cells play a very important role in biological experiments. To effectively detect cell activity, we fabricated a biomicroelectrode chip for cell activity detection using a semiconductor process, and then completed the package of a cell activity sensor by bonding the bio-microelectrode chip to a PCB using wire bonding technology and completing the encapsulation of the cell culture chamber on the bio-microelectrode chip. To verify the feasibility of the sensor for cell activity detection, CHO cells were grown in the cell culture cavity and cultured for 24 h. TrypLE (an excellent substitute for trypsin) was used to dissociate the adherent CHO and simulate the death of CHO cells, while the output impedance of the sensor was measured. The experimental results showed that the output impedance of the sensor changed significantly at 10^3~10^5 Hz during the gradual dissociation of CHO cells. Combined with the model analysis, it can be tentatively concluded that the sensor has the function of detecting cell activity.