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玛卡巴卡
Lv2
1
180 积分
2023-03-23 加入
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Characterization of Overlay and Tilt in Advanced Technology Nodes using Scatterometry
1小时前
待确认
Wafer-based aberration metrology for lithographic systems using overlay measurements on targets imaged from phase-shift gratings
14天前
已完结
Linewidth Reconstruction Employing a Radial Basis Function Network in Optical Scatterometry
1个月前
已完结
Modified rigorous coupled-wave analysis for multi-layer deformable gratings with arbitrary profiles and materials
4个月前
已完结
Modal analysis of high-efficiency wideband reflective gratings
4个月前
已完结
High-Efficiency Broadband Polarization-Independent Reflective Grating with Double-Layer Dielectric Rectangle Groove in Littrow Mounting
4个月前
已完结
Design of double-layer metal-dielectric reflecting polarizing beam splitter grating based on simplified mode method
4个月前
已完结
A 1 × 2 Two-Dimensional Slanted Grating Based on Double-Layer Cylindrical Structure
4个月前
已完结
Tailoring Wavelength-Selective Diffraction Efficiency Using Triple-Layer Double-Relief Blazed Gratings Incorporating Materials with Intersecting Dispersion Curves
4个月前
已完结
Scattering-matrix analysis of periodically patterned multilayers with asymmetric unit cells and birefringent media
4个月前
已完结
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4个月前
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