Lv3
270 积分 2024-10-24 加入
Stress control in thick hydrogenated amorphous carbon films to mitigate stress-induced defects in semiconductor processes
4天前
已完结
Detection of hydrogen desorption from hydrogenated amorphous carbon films by sliding
4天前
已完结
Effect of unbonded hydrogen on amorphous carbon film deposited by PECVD with annealing treatment
4天前
已完结
Surface Analysis of Amorphous Carbon Thin Film for Etch Hard Mask
4天前
已完结
PECVD technology deposition of high hardness a-C:H films on micro-drill surfaces: Substrate bias voltage effects
4天前
已完结
Properties of nitrogen-doped amorphous hydrogenated carbon films
16天前
已完结
Mechanical properties and thermal stability of nitrogen incorporated diamond-like carbon films
16天前
已完结
Physical and electrical properties of nitrogen-doped hydrogenated amorphous carbon films
16天前
已完结
Comparison of the properties of a-C:H films deposited from methane and heptane precursors: study of the mechanical, chemical and structural properties
16天前
已完结
Nitrogen Doped High Selectivity Amorphous Carbon Film for High Aspect Ratio Etch Process
16天前
已完结
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