切趾
绝缘体上的硅
材料科学
栅栏
光学
衍射光栅
衍射效率
光电子学
硅
联轴节(管道)
物理
冶金
作者
Yunhong Ding,Christophe Peucheret,Haiyan Ou,Kresten Yvind
出处
期刊:Optics Letters
[The Optical Society]
日期:2014-09-05
卷期号:39 (18): 5348-5348
被引量:213
摘要
We design and fabricate an ultrahigh coupling efficiency (CE) fully etched apodized grating coupler on the silicon-on-insulator (SOI) platform using subwavelength photonic crystals and bonded aluminum mirror. Fabrication error sensitivity and coupling angle dependence are experimentally investigated. A record ultrahigh CE of −0.58 dB with a 3 dB bandwidth of 71 nm and low back reflection are demonstrated.
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