退火(玻璃)
材料科学
结晶度
拉曼光谱
透射电子显微镜
光致发光
高温合金
兴奋剂
掺杂剂
再结晶(地质)
外延
冶金
分析化学(期刊)
光电子学
微观结构
复合材料
纳米技术
图层(电子)
化学
光学
古生物学
物理
生物
色谱法
作者
Cristiano Calabretta,Massimo Zimbone,Eric G. Barbagiovanni,Simona Boninelli,Nico Piluso,Andrea Severino,Maria Ausilia Di Stefano,Simona Lorenti,L. Calcagno,Francesco La Via
出处
期刊:Le Centre pour la Communication Scientifique Directe - HAL - Diderot
日期:2010-01-04
被引量:35
标识
DOI:10.4028/www.scientific.net
摘要
In this work, we have studied the crystal defectiveness and doping activation subsequent to ion implantation and post-annealing by using various techniques including photoluminescence (PL), Raman spectroscopy and transmission electron microscopy (TEM). The aim of this work was to test the effectiveness of double step annealing to reduce the density of point defects generated during the annealing of a P implanted 4H-SiC epitaxial layer. The outcome of this work evidences that neither the first, 1 hour isochronal annealing at 1650 - 1700 - 1750 {\deg}C, nor the second one, at 1500 {\deg}C for times between 4 hour and 14 hour, were able to recover a satisfactory crystallinity of the sample and achieve dopant activations exceeding 1%.
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