材料科学
二氧化硅
硅
固体物理学
工程物理
纳米技术
作者
S. S. Nekrashevich,Vladimir A. Gritsenko
标识
DOI:10.1134/s106378341402022x
摘要
Silicon dioxide amorphous films are the key insulators in silicon integrated circuits. The physical properties of silicon dioxide are determined by the electronic structure of this material. The currently available information on the electronic structure of silicon dioxide has been systematized.
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