压电
PMUT公司
材料科学
传感器
超声波
电容式微机械超声换能器
超声波传感器
声学
计算机科学
复合材料
物理
作者
Steve Wong,Kaustav Roy,Chengkuo Lee,Yao Zhu
出处
期刊:IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control
[Institute of Electrical and Electronics Engineers]
日期:2024-01-01
卷期号:: 1-1
标识
DOI:10.1109/tuffc.2024.3390807
摘要
Thin-film piezoelectric micromachined ultrasound transducers (PMUTs) are an increasingly relevant and well-researched field, and their biomedical importance has been growing as the technology continues to mature. This review paper briefly discusses their history in biomedical use, provides a simple explanation of their principles for newer readers, and sheds light on the materials selection for these devices. Primarily, it discusses the significant applications of PMUTs in the biomedical industry and showcases recent progress that has been made in each application. The biomedical applications covered include common historical uses of ultrasound such as ultrasound imaging, ultrasound therapy, and fluid sensing, but additionally new and upcoming applications such as drug delivery, photoacoustic imaging, thermoacoustic imaging, biometrics, and intrabody communication. By including a device comparison chart for different applications, this review aims to assist MEMS designers that work with PMUTs by providing a benchmark for recent research works. Furthermore, it puts forth a discussion on the current challenges being faced by PMUTs in the biomedical field, current and likely future research trends, and opportunities for PMUT development areas, as well as sharing the opinions and predictions of the authors on the state of this technology as a whole. The review aims to be a comprehensive introduction to these topics without diving excessively deep into existing literature.
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