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hyelachan
Lv0
2
0 积分
2023-12-07 加入
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Unraveling strength and mechanical properties of CNT-based EUV pellicle
31分钟前
已完结
Investigation of EUV pellicle deflection and mechanical stress within EUV inner pod under vacuum activity
2小时前
已完结
Extreme-ultraviolet pellicle durability comparison for better lifetime
6小时前
已完结
Thermo-mechanical behavior analysis of extreme-ultraviolet pellicle cooling with H2 flow
4天前
已完结
Free-standing carbon nanotube films for extreme ultraviolet pellicle application
7天前
已完结
Manufacturing Large-scale SiNx EUV Pellicle with Water Bath
8天前
已关闭
Rigorous simulation of EUV mask pellicle
8天前
已完结
Thermomechanical stability evaluation of various pellicle structures with contaminant particles
8天前
已完结
Thermo-mechanical behavior analysis of extreme-ultraviolet pellicle cooling with H2 flow
8天前
已完结
Investigation of EUV pellicle deflection and mechanical stress within EUV inner pod under vacuum activity
8天前
已完结
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