Lv11
8 积分 2023-12-07 加入
Reduced lifetime of EUV pellicles due to defects
8小时前
待确认
Relative lifetime estimation of EUV pellicle by normalized thermal stress
8小时前
待确认
Lifetime estimation of extreme-ultraviolet pellicle at 500 W source power by thermal stress analysis
8天前
已完结
Lifetime impact on residual stress of EUV pellicle
8天前
已完结
EUVL is being inserted in manufacturing in 2019: What are the mask related challenges remaining?
8天前
已完结
Estimation of mechanical stability of EUV pellicle by the collision of the particle defect
9天前
已完结
Estimation of mechanical stability of EUV pellicle by the collision of the particle defect
13天前
已关闭
High-transmission EUV pellicles supporting >400W source power
16天前
已完结
Impact of MoSi2 crystal structure on nano-membrane emissivity
25天前
已关闭
The thermal diffusion blocking effect of holes enclosing core fiber
30天前
已完结
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