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Diamond-like amorphous carbon layer film by an inductively coupled plasma system for next generation etching hard mask
11小时前
待确认
High aspect ratio contact hole etching using relatively transparent amorphous carbon hard mask deposited from propylene
18小时前
已完结
Boron-doped amorphous carbon deposited by DC sputtering for a hardmask: Microstructure and dry etching properties
8天前
已完结
Plasma etching of silicon carbide trenches with high aspect ratio and rounded corners
14天前
已完结
Hard mask and lithographic capabilities improvement by amorphous carbon step coverage optimization in high aspect ratio device pattern
3个月前
已完结
Study of Tungsten-Doped Carbon Hard Mask Etch Process Using NF3/O2 Based Chemistry
3个月前
已完结
Carbon Hard Mask Opening Process Development with Novel Sidewall Passivation in Memory Manufacturing
3个月前
已完结
Growth mechanism of amorphous hydrogenated carbon
3个月前
已完结
Influence of the plasma pressure on the microstructure and on the optical and mechanical properties of amorphous carbon films deposited by direct current magnetron sputtering
3个月前
已完结
Bonding Structure and Dry Etching Characteristics in Amorphous B-C-N Films for Hardmask Applications
5个月前
已完结
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