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Thermal Versus Plasma-Enhanced ALD: Growth Kinetics and Conformality
2小时前
待确认
Computational Fluid Dynamics simulation of the ALD of alumina from TMA and H2O in a commercial reactor
2个月前
已完结
Transparent ALD-grown Ta2O5 protective layer for highly stable ZnO photoelectrode in solar water splitting
2个月前
已完结
Atomic Layer Deposition of SiO2 for the Performance Enhancement of Fin Field Effect Transistors
3个月前
已完结
Atomic layer deposition of SiO2 for the performance enhancement of fin field effect transistors
3个月前
已关闭
Review—Atomic Layer Deposition of Silicon Dioxide Thin Films
3个月前
已完结
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