飞秒
材料科学
光学
极化(电化学)
微通道
制作
激光器
光电子学
超短脉冲
蚀刻(微加工)
纳米技术
物理
化学
病理
物理化学
医学
替代医学
图层(电子)
作者
Xueliang Yan,Lan Jiang,X. Li,Kai Zhang,Bo Xia,P. Liu,Liangti Qu,Yongfeng Lu
出处
期刊:Optics Letters
[The Optical Society]
日期:2014-08-29
卷期号:39 (17): 5240-5240
被引量:21
摘要
We propose an approach to realize polarization-independent etching of fused silica by using temporally shaped femtosecond pulse trains to control the localized transient electrons dynamics. Instead of nanograting formation using traditional unshaped pulses, for the pulse delay of pulse trains larger than 1 ps, coherent field-vector-related coupling is not possible and field orientation is lost. The exponential growth of the periodic structures is interrupted. In this case, disordered and interconnected nanostructures are formed, which is probably the main reason of etching independence on the laser polarization. As an application example, square-wave-shaped and arc-shaped microchannels are fabricated by using pulse trains to demonstrate the advantage of the proposed method in fabricating high-aspect-ratio and three-dimensional microchannels.
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