High-Q-factor Spoof Localized Surface Plasmon Sensor for MIM Detection

In this research, a metal-insulator-metal (MIM) sensor consists of two spoof localized surface plasmon (LSP) structures with corrugated rings coupled to each other is designed, fabricated and measured. The experimental verification is consistent with the simulation. Q-factor up to 161.6 and sensing Figure of merit (FoM) up to 33.7 RIU ^-1 are achieved. This sensor potentially has a wide application prospect in the field of high-frequency resonator and sensitive sensor.