Lv11
30 积分 2023-08-25 加入
Atomic layer etching of SiO2 with self-limiting behavior on the surface modification step using sequential exposure of HF and NH3
1小时前
待确认
Electron power absorption in low pressure capacitively coupled electronegative oxygen radio frequency plasmas
23天前
已完结
Kinetic simulations of capacitively coupled plasmas driven by tailored voltage waveforms with multi-frequency matching
23天前
已完结
Influence of external circuitry on CF4 breakdown process in capacitively coupled plasma
1个月前
已完结
On the Impedance of the High-Frequency Capacitive Discharge at Different Excitation Methods
1个月前
已完结
Effect of heating on dissociation of water vapor in high-frequency plasmas and formation of hydrogen peroxide in a cold trap downstream of the plasma
2个月前
已完结
Reactions of hydrogen peroxide vapor dissociated in a microwave plasma
2个月前
已完结
Features of Processes in the Microwave Discharge in Water Vapor
2个月前
已完结
Physicochemical Activation of Distilled Water by a Jet of Microwave Plasma Argon in an Atmosphere of Water Vapor
2个月前
已完结
Use of plasma process diagnostic sensors for the monitoring of in situ dry cleaning of plasma enhanced chemical vapor deposition chamber
3个月前
已完结
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