Lv3
270 积分 2020-06-23 加入
Study on the Fe Contamination in the Nitride Deposition by LPCVD
2年前
已完结
变温LPCVD沉积氮化硅薄膜的均匀性优化
2年前
已完结
Low-k SiN film for Cu interconnects integration fabricated by ultra low temperature thermal CVD
2年前
已完结
Growth studies and characterization of silicon nitride thin films deposited by alternating exposures to Si2Cl6 and NH3
2年前
已完结
Analysis of LPCVD process conditions for the deposition of low stress silicon nitride. Part I: preliminary LPCVD experiments
2年前
已完结
LPCVD of Silicon Nitride Films From Hexachlorodisilane and Ammonia
2年前
已完结
Film Properties of Low‐k Silicon Nitride Films Formed by Hexachlorodisilane and Ammonia
2年前
已完结
Molecular Engineering of DNA-inspired Janus base nanomaterials
2年前
已完结
Introduction to Ceramics
2年前
已关闭
A Study of the Thermal Conductivity, Electrical Resistivity, and Microwave Absorption of Pressureless Sintered AlN–Y2O3–Mo and AlN–Y2O3–TiN Composites
2年前
已关闭
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