Lv11
70 积分 2024-11-14 加入
Investigation of the influence of hardmask morphology on bowing effect in nano-scale silicon plasma etching process
7天前
已完结
Formation Mechanism of Rounded SiGe-Etch Front in Isotropic SiGe Plasma Etching for Gate-All-Around FETs
10天前
已完结
Modeling of microtrenching and bowing effects in nanoscale Si inductively coupled plasma etching process
11天前
已完结
Investigation of the influence of hardmask morphology on bowing effect in nano-scale silicon plasma etching process
11天前
已关闭
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